LASER WAVELENGTH CONTROL UNIT WITH PIEZOELECTRIC DRIVER

Details for Australian Patent Application No. 2002257000 (hide)

Owner CYMER, INC.

Inventors SPANGLER, Ronald, L.; JACQUES, Robert, N.; RULE, John, A.; PALENSCHAT, Frederick, A.; FOMENKOV, Igor, V.; ALGOTS, John, M.; LIPCON, Jacob, P.; SANDSTROM, Richard, L.

Pub. Number AU-A-2002257000

PCT Pub. Number WO2002/069461

Priority 09/794,782 27.02.01 US; 10/027,210 21.12.01 US

Filing date 15 February 2002

Wipo publication date 12 September 2002

International Classifications

H01S 003/10 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves - Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating

H01S 003/223 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

H01S 003/22 Lasers, i.e. devices for generation, amplification, modulation, demodulation, or frequency-changing, using stimulated emission, of infra-red, visible, or ultra-violet waves

Event Publications

6 March 2003 Application Open to Public Inspection

  Published as AU-A-2002257000

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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