METHOD FOR CLEANING SURFACE OF SUBSTRATE

Details for Australian Patent Application No. 2002256900 (hide)

Owner MITSUBISHI CHEMICAL CORPORATION

Inventors MORINAGA, Hitoshi; MOCHIZUKI, Hideaki

Pub. Number AU-A-2002256900

PCT Pub. Number WO2002/094462

Priority 2001-151960 22.05.01 JP

Filing date 20 May 2002

Wipo publication date 3 December 2002

International Classifications

B08B 003/08 Cleaning by methods involving the use or presence of liquid or steam - the liquid having chemical or dissolving effect

Event Publications

8 May 2003 Application Open to Public Inspection

  Published as AU-A-2002256900

11 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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