A METHOD FOR FABRICATING A STRUCTURE FOR A MICROELECTROMECHANICAL SYSTEMS (MEMS) DEVICE

Details for Australian Patent Application No. 2002256386 (hide)

Owner IRIDIGM DISPLAY CORPORATION

Inventors MILES, Mark, W.

Pub. Number AU-A-2002256386

PCT Pub. Number WO2003/069413

Priority 10/074,562 12.02.02 US

Filing date 29 April 2002

Wipo publication date 4 September 2003

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

G03F 007/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

Event Publications

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002256386

28 October 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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