SYSTEM AND METHOD FOR FILTERING OUTPUT IN MASS FLOW CONTROLLERS AND MASS FLOW METERS

Details for Australian Patent Application No. 2002256365 (hide)

Owner MYKROLIS CORPORATION

Inventors FAISAL, Tariq

Pub. Number AU-A-2002256365

PCT Pub. Number WO2002/088639

Priority 60/286,934 27.04.01 US

Filing date 26 April 2002

Wipo publication date 11 November 2002

International Classifications

G01F 001/00 Measuring volume flow

G06F 019/00 Digital computing or data processing equipment or methods, specially adapted for specific applications

Event Publications

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002256365

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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