APPARATUS AND METHOD FOR IMPROVING PLASMA DISTRIBUTION AND PERFORMANCE IN AN INDUCTIVELY COUPLED PLASMA

Details for Australian Patent Application No. 2002256246 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors BRCKA, Jozef

Pub. Number AU-A-2002256246

PCT Pub. Number WO2002/086943

Priority 09/840,320 23.04.01 US

Filing date 17 April 2002

Wipo publication date 5 November 2002

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002256246

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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