INDUCTIVELY COUPLED PLASMA CONTROL WITH EXTERNAL MAGNETIC MATERIAL

Details for Australian Patent Application No. 2002256073 (hide)

Owner LAM RESEARCH CORPORATION

Inventors NISHIDA, Takumasa; NAKAJIMA, Shu; BENJAMIN, Neil; PERRY, Andrew

Pub. Number AU-A-2002256073

PCT Pub. Number WO2002/084700

Priority 09/834,749 12.04.01 US

Filing date 2 April 2002

Wipo publication date 28 October 2002

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002256073

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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