METHOD OF COMPENSATING FOR ETCH EFFECTS IN PHOTOLITHOGRAPHIC PROCESSING

Details for Australian Patent Application No. 2002255917 (hide)

Owner MENTOR GRAPHICS CORPORATION

Inventors GRANIK, Yuri; SCHELLENBERG, Franklin, M.

Pub. Number AU-A-2002255917

PCT Pub. Number WO2002/073506

Priority 60/275,673 13.03.01 US; 09/898,431 02.07.01 US

Filing date 11 March 2002

Wipo publication date 24 September 2002

International Classifications

G06G 007/48 Devices in which the computing operation is performed by varying electric or magnetic quantities

G06F 017/50 Digital computing or data processing equipment or methods, specially adapted for specific functions - Computer-aided design

G06F 009/44 Arrangements for programme control, e.g. control unit - Arrangements for executing specific programmes

G06F 013/10 Interconnection of, or transfer of information or other signals between, memories, input/output devices or central processing units - Programme control for peripheral devices

G06F 013/12 Interconnection of, or transfer of information or other signals between, memories, input/output devices or central processing units - using hardware independent of the central processor, e.g. channel or peripheral processor

Event Publications

20 March 2003 Application Open to Public Inspection

  Published as AU-A-2002255917

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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