PROCESS FOR DEPOSITING AND PLANARIZING BPSG FOR DENSE TRENCH MOSFET APPLICATION

Details for Australian Patent Application No. 2002255610 (hide)

Owner FAIRCHILD SEMICONDUCTOR CORPORATION

Inventors LINN, Jack, H.; RIDLEY, Rodney, S.; STENSNEY, Frank; BENJAMIN, John, L.

Pub. Number AU-A-2002255610

PCT Pub. Number WO2002/069394

Priority 60/271,832 27.02.01 US

Filing date 26 February 2002

Wipo publication date 12 September 2002

International Classifications

H01L 021/762 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 March 2003 Application Open to Public Inspection

  Published as AU-A-2002255610

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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