LITHOGRAPHY METHOD FOR FORMING SEMICONDUCTOR DEVICES ON A WAFER AND APPARATUS

Details for Australian Patent Application No. 2002255557 (hide)

Owner MOTOROLA, INC.

Inventors MAUTZ, Karl, Emerson; MALTABES, John, George; CHARLES, Alain, Bernard

Pub. Number AU-A-2002255557

PCT Pub. Number WO2002/073688

Priority 09/801,522 08.03.01 US

Filing date 15 February 2002

Wipo publication date 24 September 2002

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

20 March 2003 Application Open to Public Inspection

  Published as AU-A-2002255557

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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