ULTRA LOW-K DIELECTRIC MATERIALS

Details for Australian Patent Application No. 2002255530 (hide)

Owner CHEMAT TECHNOLOGY, INC.

Inventors BALL, Ian, J.; JANG, Qin; SHI, Yuwen

Pub. Number AU-A-2002255530

PCT Pub. Number WO2002/065534

Priority 60/267,921 12.02.01 US; 10/071,134 08.02.02 US

Filing date 11 February 2002

Wipo publication date 28 August 2002

International Classifications

H01L 021/31 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/47 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

C08J 009/06 Working-up of macromolecular substances to porous or cellular articles or materials

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002255530

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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