SPHERICAL DRIVE ASSEMBLY FOR CHEMICAL MECHANICAL PLANARIZATION

Details for Australian Patent Application No. 2002255468 (hide)

Owner STRASBAUGH

Inventors HALLEY, David, G.

Pub. Number AU-A-2002255468

PCT Pub. Number WO2002/060643

Priority 09/699,287 26.10.00 US

Filing date 23 October 2001

Wipo publication date 12 August 2002

International Classifications

B24B 007/22 Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces

B24B 049/02 Measuring - according to the instantaneous size and required size of the workpiece acted upon, the measuring or gauging being continuous or intermittent

B24B 001/00

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002255468

29 January 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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