DEVICE ANDE METHOD FOR PREDICTING CIRCUIT PATTERN TRANSFER CHARACTERISTICS AND DEVICE AND METHOD FOR PROVIDING EXPOSURE SYSTEM PERFORMANCE INFORMATION AND INFORMATION OUTPUTTING SYSTEM AND INFORMATION OUTPUTTING METHOD

Details for Australian Patent Application No. 2002255319 (hide)

Owner NIKON CORPORATION

Inventors TANIMOTO, Akikazu

Pub. Number AU-A-2002255319

PCT Pub. Number WO2002/101801

Priority 2001-137249 08.05.01 JP

Filing date 8 May 2002

Wipo publication date 23 December 2002

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002255319

26 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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