OPTICAL CHARACTERISTIC MEASURING METHOD, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

Details for Australian Patent Application No. 2002255306 (hide)

Owner NIKON CORPORATION

Inventors MIYASHITA, Kazuyuki; MIKUCHI, Takashi

Pub. Number AU-A-2002255306

PCT Pub. Number WO2002/091440

Priority 2002-31902 08.02.02 JP; 2002-31916 08.02.02 JP; 2001-135779 07.05.01 JP

Filing date 7 May 2002

Wipo publication date 18 November 2002

International Classifications

H01L 021/027 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

G01J 001/00 Photometry, e.g. photographic exposure meter

G01M 011/02 Testing of optical apparatus - Testing of optical properties

Event Publications

1 May 2003 Application Open to Public Inspection

  Published as AU-A-2002255306

26 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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