METHOD FOR PLASMA COATING AND DEVICE FOR CARRYING OUT THE METHOD

Details for Australian Patent Application No. 2002254954 (hide)

Owner GFE METALLE UND MATERIALIEN GMBH

Inventors BREME, Frank; BUTTSTADT, Johannes

Pub. Number AU-A-2002254954

PCT Pub. Number WO2002/075021

Priority 101 13 030.9 17.03.01 DE

Filing date 16 March 2002

Wipo publication date 3 October 2002

International Classifications

C23C 016/455 Chemical deposition or plating by decomposition - characterised by the method used for introducing gases into the reaction chamber or for modifying gas flows in the reaction chamber

C23C 016/458 Chemical deposition or plating by decomposition - characterised by the method used for supporting substrates in the reaction chamber

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002254954

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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