APPARATUS AND METHODS FOR ALIGNING A SURFACE OF AN ACTIVE RETAINER RING WITH A WAFER SURFACE FOR CHEMICAL MECHANICAL POLISHING

Details for Australian Patent Application No. 2002254492 (hide)

Owner LAM RESEARCH CORPORATION

Inventors SALDANA, Miguel, A.; WILLIAMS, Damon, Vincent

Pub. Number AU-A-2002254492

PCT Pub. Number WO2002/078900

Priority 09/823,169 29.03.01 US

Filing date 28 March 2002

Wipo publication date 15 October 2002

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24B 041/06 Component parts of general applicability for grinding machines or devices - Work supports, e.g. adjustable steadies

Event Publications

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002254492

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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