AN APPARATUS AND METHOD FOR CREATING AN ULTRA-CLEAN MINIENVIRONMENT THROUGH LOZALIZED AIR FLOW AUGMENTATION

Details for Australian Patent Application No. 2002254337 (hide)

Owner LAM RESEARCH CORPORATION

Inventors HALSEY, Harlan, I.; JACOB, David, E.

Pub. Number AU-A-2002254337

PCT Pub. Number WO2002/080236

Priority 09/823,574 30.03.01 US

Filing date 22 March 2002

Wipo publication date 15 October 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002254337

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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