A MICRO-ELECTRO-MECHANICAL SWITCH AND A METHOD OF USING AND MAKING THEREOF

Details for Australian Patent Application No. 2002254191 (hide)

Owner ROCHESTER INSTITUTE OF TECHNOLOGY

Inventors POTTER, Michael, D.

Pub. Number AU-A-2002254191

PCT Pub. Number WO2002/073673

Priority 60/275,386 13.03.01 US

Filing date 12 March 2002

Wipo publication date 24 September 2002

International Classifications

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B44C 001/22 Processes, not specifically provided for elsewhere, for producing decorative surface effects - Removing surface-material, e.g. by engraving, by etching

C03C 015/00 Surface treatment of glass

Event Publications

20 March 2003 Application Open to Public Inspection

  Published as AU-A-2002254191

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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