OPTICAL SIGNAL TRANSMISSION FOR ELECTRON BEAM IMAGING APPARATUS

Details for Australian Patent Application No. 2002254165 (hide)

Owner APPLIED MATERIALS, INC.

Inventors SULLIVAN, Jeffrey; MANKOS, Marian; MURAY, Lawrence; FERNANDEZ, Andres; COYLE, Steven

Pub. Number AU-A-2002254165

PCT Pub. Number WO2002/082187

Priority 09/832,276 09.04.01 US

Filing date 11 March 2002

Wipo publication date 21 October 2002

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

H01J 037/317 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - for changing properties of the objects or for applying thin layers thereon, e.g. ion implantation

Event Publications

10 April 2003 Application Open to Public Inspection

  Published as AU-A-2002254165

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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