THERMAL REGULATION OF AN ION IMPLANTATION SYSTEM

Details for Australian Patent Application No. 2002254135 (hide)

Owner ADVANCED TECHNOLOGY MATERIALS, INC.

Inventors VELLA, Michael, C.

Pub. Number AU-A-2002254135

PCT Pub. Number WO2002/073651

Priority 09/800,643 07.03.01 US

Filing date 6 March 2002

Wipo publication date 24 September 2002

International Classifications

H01J 037/08 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Ion sources

Event Publications

20 March 2003 Application Open to Public Inspection

  Published as AU-A-2002254135

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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