TOPOLOGICALLY TAILORED SPUTTERING TARGETS

Details for Australian Patent Application No. 2002254064 (hide)

Owner HONEYWELL INTERNATIONAL INC.

Inventors LEE, Eal

Pub. Number AU-A-2002254064

PCT Pub. Number WO2003/000950

Priority 60/270,211 20.02.01 US

Filing date 20 February 2002

Wipo publication date 8 January 2003

International Classifications

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

Event Publications

19 June 2003 Application Open to Public Inspection

  Published as AU-A-2002254064

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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