CHEMICAL-MECHANICAL PLANARIZATION USING OZONE

Details for Australian Patent Application No. 2002253902 (hide)

Owner EKC TECHNOLOGY, INC.

Inventors SMALL, Robert, J.; SHANG, Xiaowei

Pub. Number AU-A-2002253902

PCT Pub. Number WO2002/065529

Priority 09/783,069 13.02.01 US

Filing date 8 February 2002

Wipo publication date 28 August 2002

International Classifications

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002253902

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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