CORROSION RESISTANT COMPONENT OF SEMICONDUCTOR PROCESSING EQUIPMENT AND METHOD OF MANUFACTURE THEREOF

Details for Australian Patent Application No. 2002253787 (hide)

Owner LAM RESEARCH CORPORATION

Inventors O'DONNELL, Robert, J.; CHANG, Christopher, C.; DAUGHERTY, John, E.

Pub. Number AU-A-2002253787

PCT Pub. Number WO2002/068129

Priority 09/749,921 29.12.00 US

Filing date 21 November 2001

Wipo publication date 12 September 2002

International Classifications

B05D 001/02 Processes for applying liquids or other fluent materials - performed by spraying

C23C 004/04 Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge - characterised by the coating material

C09K 019/38 Liquid crystal materials - Polymers, e.g. polyamides

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

C23C 016/44 Chemical deposition or plating by decomposition - characterised by the method of coating

Event Publications

6 March 2003 Application Open to Public Inspection

  Published as AU-A-2002253787

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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