EXPOSURE METHOD AND APPARATUS

Details for Australian Patent Application No. 2002253574 (hide)

Owner CANON KABUSHIKI KAISHA

Inventors SAITOH, Kenji; SUZUKI, Akiyoshi; YAMAZOE, Kenji

Pub. Number AU-A-2002253574

PCT Pub. Number WO2002/088843

Priority 2001-126759 24.04.01 JP; 2001-369393 03.12.01 JP

Filing date 24 April 2002

Wipo publication date 11 November 2002

Event Publications

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002253574

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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