ION-BEAM DEPOSITION PROCESS FOR MANUFACTURING BINARY PHOTOMASK BLANKS

Details for Australian Patent Application No. 2002252701 (hide)

Owner DIEU, Laurent E.I. DU PONT DE NEMOURS AND COMPANY CAR- CIA, Peter, Francis

Inventors DIEU, Laurent; CARCIA, Peter, Francis

Pub. Number AU-A-2002252701

PCT Pub. Number WO2002/086622

Priority 60/284,831 19.04.01 US

Filing date 19 April 2002

Wipo publication date 5 November 2002

International Classifications

G03F 001/08 Preparation of originals for the photomechanical production of textured or patterned surfaces - Originals having inorganic imaging layers, e.g. chrome masks

C03C 017/34 Surface treatment of glass, e.g. of devitrified glass, not in the form of fibres or filaments, by coating - with at least two coatings having different compositions

Event Publications

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002252701

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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