RF POWER PROCESS APPARATUS AND METHODS

Details for Australian Patent Application No. 2002252598 (hide)

Owner JEWETT, Russell, F.

Inventors JEWETT, Russell, F.; ELSTON, Jason, F.; TUCKER, Steven, D.

Pub. Number AU-A-2002252598

PCT Pub. Number WO2002/082861

Priority 60/282,081 07.04.01 US

Filing date 4 April 2002

Wipo publication date 21 October 2002

International Classifications

H05B 006/06 Heating by electric, magnetic, or electromagnetic fields - Control, e.g. of temperature, of power

H05B 006/36 Heating by electric, magnetic, or electromagnetic fields - Coil arrangements

B23K 010/00 Welding or cutting by means of a plasma

H01J 007/24 Details not provided for in groups and common to two or more basic types of discharge tubes or lamps

C23C 016/00 Chemical deposition or plating by decomposition

H01L 021/36 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

10 April 2003 Application Open to Public Inspection

  Published as AU-A-2002252598

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002252599-TWO-FIBER OPTICAL SHARED PROTECTION RING WITH A BIDIRECTIONAL 4X4 OPTICAL SWITCH FABRIC

2002252597-PORTABLE CLEANING ASSEMBLY