METHOD OF FABRICATING NANOMETER-SCALE FLOWCHANNELS AND TRENCHES WITH SELFALIGNED ELECTRODES AND STRUCTURES FORMED BY THE SAME

Details for Australian Patent Application No. 2002252299 (hide)

Owner CALIFORNIA INSTITUTE OF TECHNOLOGY

Inventors SCHERER, Axel

Pub. Number AU-A-2002252299

PCT Pub. Number WO2002/073314

Priority 09/803,840 12.03.01 US

Filing date 12 March 2002

Wipo publication date 24 September 2002

International Classifications

G03F 007/00 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces

Event Publications

20 March 2003 Application Open to Public Inspection

  Published as AU-A-2002252299

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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