POLARIZATION VECTOR ALIGNMENT FOR INTERFERENCE LITHOGRAPHY PATTERNING

Details for Australian Patent Application No. 2002252136 (hide)

Owner OPTICAL SWITCH CORPORATION

Inventors KELSEY, Adam, F.; LECLERC, Mark, A.; MACLEOD, Bruce, D.

Pub. Number AU-A-2002252136

PCT Pub. Number WO2002/069050

Priority 09/826,445 04.04.01 US; 09/796,665 28.02.01 US

Filing date 27 February 2002

Wipo publication date 12 September 2002

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

6 March 2003 Application Open to Public Inspection

  Published as AU-A-2002252136

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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