METHOD FOR MANUFACTURING A POLISHING PAD HAVING A COMPRESSED TRANSLUCENT REGION

Details for Australian Patent Application No. 2002252129 (hide)

Owner CABOT MICROELECTRONICS CORPORATION

Inventors JONES, Jeremy; SEVILLA, Roland, K.

Pub. Number AU-A-2002252129

PCT Pub. Number WO2002/070200

Priority 60/272,691 01.03.01 US

Filing date 27 February 2002

Wipo publication date 19 September 2002

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

B24D 007/12 Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face

B29C 043/00 Compression moulding, i.e. applying external pressure to flow the moulding material

Event Publications

13 March 2003 Application Open to Public Inspection

  Published as AU-A-2002252129

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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