APPARATUS AND METHOD FOR WEB COOLING IN A VACUUM COATING CHAMBER

Details for Australian Patent Application No. 2002252094 (hide)

Owner APPLIED PROCESS TECHNOLOGIES

Inventors MADOCKS, John, E.; LEMME, Charles, D.

Pub. Number AU-A-2002252094

PCT Pub. Number WO2002/070778

Priority 60/273,712 05.03.01 US

Filing date 27 February 2002

Wipo publication date 19 September 2002

International Classifications

C23C 016/00 Chemical deposition or plating by decomposition

C23C 016/458 Chemical deposition or plating by decomposition - characterised by the method used for supporting substrates in the reaction chamber

C23C 014/24 Coating by vacuum evaporation, by sputtering or by ion implantation - Vacuum evaporation

Event Publications

13 March 2003 Application Open to Public Inspection

  Published as AU-A-2002252094

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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