EXTREME ULTRAVIOLET MASK WITH IMPROVED ABSORBER

Details for Australian Patent Application No. 2002252008 (hide)

Owner INTEL CORPORATION

Inventors ZHANG, Guojing; YAN, Pei-Yang

Pub. Number AU-A-2002252008

PCT Pub. Number WO2002/079875

Priority 09/823,641 30.03.01 US

Filing date 14 February 2002

Wipo publication date 15 October 2002

International Classifications

G03F 001/14 Preparation of originals for the photomechanical production of textured or patterned surfaces - Originals characterised by structural details, e.g. supports, cover layers, pellicle rings

Event Publications

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002252008

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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