METHOD AND APPARATUS FOR ELECTROCHEMICAL PLANARIZATION OF A WORKPIECE

Details for Australian Patent Application No. 2002251917 (hide)

Owner SPEEDFAM-IPEC CORPORATION

Inventors EMESH, Ismail; CHADDA, Saket; KOROVIN, Nikolay, N.; MUELLER, Brian, L.

Pub. Number AU-A-2002251917

PCT Pub. Number WO2002/064314

Priority 09/781,593 12.02.01 US

Filing date 12 February 2002

Wipo publication date 28 August 2002

International Classifications

B24B 037/04 Lapping machines or devices, i.e. requiring pulverulent abrading substances inserted between a lap of relatively soft but rigid material and the surface to be lapped - designed for working plane surfaces

H01L 021/321 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/306 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

B23H 003/00 Electrochemical machining, i.e. removing metal by passing current between an electrode and a workpiece in the presence of an electrolyte

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002251917

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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