NANOPOROUS DIELECTRIC FILMS WITH GRADED DENSITY AND PROCESS FOR MAKING SUCH FILMS

Details for Australian Patent Application No. 2002251769 (hide)

Owner HONEYWELL INTERNATIONAL INC.

Inventors WALLACE, Stephen; DRAGE, James, S.; RODRICK, Kevin, H.; RAMOS, Teresa; SMITH, Douglas, M.

Pub. Number AU-A-2002251769

PCT Pub. Number WO2003/069672

Filing date 3 January 2002

Wipo publication date 4 September 2003

International Classifications

H01L 023/522 Details of semiconductor or other solid state devices

H01L 021/316 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

2 October 2003 Application Open to Public Inspection

  Published as AU-A-2002251769

23 September 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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