REFRACTIVE INDEX REGULATION FOR MAINTAINING OPTICAL IMAGING PERFORMANCE

Details for Australian Patent Application No. 2002251674 (hide)

Owner ASML US, INC.

Inventors HELMUS, June, L.; MCCULLOUGH, Andrew, W.

Pub. Number AU-A-2002251674

PCT Pub. Number WO2002/065213

Priority 60/246,065 07.11.00 US

Filing date 7 November 2001

Wipo publication date 28 August 2002

International Classifications

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002251674

29 January 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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