CMOS STRUCTURE WITH MAXIMIZED ACTIVATION OF THE POLYSILICON GATE DOPANT AND METHOD OF MANUFACTURING THE SAME

Details for Australian Patent Application No. 2002251331 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors SCHEPIS, Dominic, Joseph; ASSADERAGHI, Fariborz; PARK, Heemyong

Pub. Number AU-A-2002251331

PCT Pub. Number WO2002/093636

Priority 09/859,021 15.05.01 US

Filing date 25 April 2002

Wipo publication date 25 November 2002

International Classifications

H01L 021/336 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/8238 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L 021/8234 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

1 May 2003 Application Open to Public Inspection

  Published as AU-A-2002251331

4 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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