METAL PATTERN FORMATION

Details for Australian Patent Application No. 2002250922 (hide)

Owner ATOTECH DEUTSCHLAND GMBH

Inventors MEYER, Heinrich; GRIESER, Udo

Pub. Number AU-A-2002250922

PCT Pub. Number WO2002/071466

Priority 101 12 023.0 07.03.01 DE

Filing date 12 February 2002

Wipo publication date 19 September 2002

International Classifications

H01L 021/3213 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H05K 003/06 Apparatus or processes for manufacturing printed circuits - the conductive material being removed chemically or electrolytically, e.g. by photo-etch process

H05K 003/24 Apparatus or processes for manufacturing printed circuits - Reinforcing of the conductive pattern

G03F 001/00 Preparation of originals for the photomechanical production of textured or patterned surfaces

Event Publications

13 March 2003 Application Open to Public Inspection

  Published as AU-A-2002250922

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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