PHOTOCATALYTIC SPUTTERING TARGETS AND METHODS FOR THE PRODUCTION AND USE THEREOF

Details for Australian Patent Application No. 2002250831 (hide)

Owner N.V. BEKAERT S.A.

Inventors HARTIG, Klaus; KRISKO, Annette, J.

Pub. Number AU-A-2002250831

PCT Pub. Number WO2002/057508

Priority 60/262,878 17.01.01 US

Filing date 14 January 2002

Wipo publication date 30 July 2002

International Classifications

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

H01J 037/34 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002250831

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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