INDUCTIVE PLASMA PROCESSOR HAVING COIL WITH PLURAL WINDINGS AND METHOD OF CONTROLLING PLASMA DENSITY

Details for Australian Patent Application No. 2002250466 (hide)

Owner LAM RESEARCH CORPORATION

Inventors CHEN, Jian, J.; VELTROP, Robert, G.; WICKER, Thomas, E.

Pub. Number AU-A-2002250466

PCT Pub. Number WO2002/080221

Priority 09/821,027 30.03.01 US

Filing date 29 March 2002

Wipo publication date 15 October 2002

International Classifications

H01J 037/32 Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof - Gas-filled discharge tubes

Event Publications

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002250466

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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