SYSTEM AND METHOD FOR MAKING THIN-FILM STRUCTURES USING A STEPPED PROFILE MASK

Details for Australian Patent Application No. 2002250311 (hide)

Owner 4WAVE, INC.

Inventors BALDWIN, David, Alan; HYLTON, Todd, Lanier

Pub. Number AU-A-2002250311

PCT Pub. Number WO2002/075016

Priority 09/810,969 16.03.01 US

Filing date 13 March 2002

Wipo publication date 3 October 2002

International Classifications

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

C23C 016/00 Chemical deposition or plating by decomposition

G02B 001/10 Optical elements characterised by the material of which they are made - Optical coatings produced by application to, or surface treatment of, optical elements

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002250311

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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