METHOD AND APPARATUS FOR IMPROVING RESOLUTION OF OBJECTS IN A SEMICONDUCTOR WAFER

Details for Australian Patent Application No. 2002250194 (hide)

Owner MENTOR GRAPHICS CORPORATION

Inventors PELL, Edwin, A., III

Pub. Number AU-A-2002250194

PCT Pub. Number WO2002/086962

Priority 09/841,762 24.04.01 US

Filing date 25 February 2002

Wipo publication date 5 November 2002

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002250194

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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