LITHOGRAPHY METHOD FOR FORMING SEMICONDUCTOR DEVICES WITH SUB-MICRON STRUCTURES ON A WAFER AND APPARATUS

Details for Australian Patent Application No. 2002250101 (hide)

Owner MOTOROLA, INC.

Inventors MALTABES, John, George; CHARLES, Alain, Bernard; MAUTZ, Karl, Emerson

Pub. Number AU-A-2002250101

PCT Pub. Number WO2002/079882

Priority 09/801,521 08.03.01 US

Filing date 15 February 2002

Wipo publication date 15 October 2002

International Classifications

G03F 009/00 Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically

G03F 007/20 Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces - Exposure

Event Publications

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002250101

12 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

Legal

The information provided by the Site not in the nature of legal or other professional advice. The information provided by the Site is derived from third parties and may contain errors. You must make your own enquiries and seek independent advice from the relevant industry professionals before acting or relying on any information contained herein. Check the above data against the Australian Patent Office AUSPAT database.

Next and Previous Patents/Applications

2002250102-Yeast screens for agents affecting protein folding

2002250100-MINI-STRUCTURED CATALYST BEDS FOR THREE-PHASE CHEMICAL PROCESSING