SYSTEM AND METHOD FOR ACTIVE CONTROL OF SPACER DEPOSITION

Details for Australian Patent Application No. 2002250002 (hide)

Owner ADVANCE MICRO DEVICES, INC.

Inventors RANGARAJAN, Bharath; TEMPLETON, Michael, K.; SINGH, Bhanwar

Pub. Number AU-A-2002250002

PCT Pub. Number WO2003/003447

Priority 09/893,824 28.06.01 US

Filing date 31 January 2002

Wipo publication date 3 March 2003

International Classifications

H01L 021/66 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof - Testing or measuring during manufacture or treatment

Event Publications

15 May 2003 Application Open to Public Inspection

  Published as AU-A-2002250002

18 March 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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