METHODS OF FORMING TITANIUMBASED AND ZIRCONIUM-BASED MIXED-METAL MATERIALS; AND SPUTTERING TARGETS

Details for Australian Patent Application No. 2002249878 (hide)

Owner HONEYWELL INTERNATIONAL INC.

Inventors TURNER, Stephen, P.; GREEN, Joseph, E.; SCAGLINE, Rodney, L.; XU, Yun

Pub. Number AU-A-2002249878

PCT Pub. Number WO2002/061168

Priority 09/695,814 24.10.00 US

Filing date 17 October 2001

Wipo publication date 12 August 2002

International Classifications

C23C 014/34 Coating by vacuum evaporation, by sputtering or by ion implantation - Sputtering

C23C 016/08 Chemical deposition or plating by decomposition

C22B 034/00 Obtaining refractory metals

C22C 027/00 Alloys based on rhenium or a refractory metal not mentioned in groups or

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002249878

29 January 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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