SLURRY AND METHOD FOR CHEMICAL MECHANICAL POLISHING OF COPPER

Details for Australian Patent Application No. 2002249848 (hide)

Owner INTEL CORPORATION

Inventors CADIEN, Kenneth, C.; MILLER, Anne, E.; FELLER, Allen, D.

Pub. Number AU-A-2002249848

PCT Pub. Number WO2002/061824

Priority 09/715,282 16.11.00 US

Filing date 29 October 2001

Wipo publication date 12 August 2002

International Classifications

H01L 021/768 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

20 February 2003 Application Open to Public Inspection

  Published as AU-A-2002249848

29 January 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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