COMPOSITION FOR CHEMICAL MECHANICAL PLANARIZATION OF COPPER, TANTALUM AND TANTALUM NITRIDE

Details for Australian Patent Application No. 2002249814 (hide)

Owner HONEYWELL INTERNATIONAL INC.

Inventors ZHANG, Fan; TOWERY, Daniel; LEVERT, Joseph; MUKHERJEE, Shyama

Pub. Number AU-A-2002249814

PCT Pub. Number WO2002/059393

Priority 09/745,266 20.12.00 US

Filing date 18 December 2001

Wipo publication date 6 August 2002

International Classifications

C23F 003/06 Brightening metals by chemical means

C09G 001/02 Polishing compositions

H01L 021/321 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 February 2003 Application Open to Public Inspection

  Published as AU-A-2002249814

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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