METHOD AND APPARATUS FOR CONTROLLING THICKNESS UNIFORMITY OF ELECTROPLATED LAYER

Details for Australian Patent Application No. 2002249798 (hide)

Owner NU TOOL INC.

Inventors BASOL, Bulent, M.; LINDQUIST, Paul

Pub. Number AU-A-2002249798

PCT Pub. Number WO2002/063072

Priority 60/256,924 21.12.00 US; 09/855,059 15.05.01 US

Filing date 11 December 2001

Wipo publication date 19 August 2002

International Classifications

C25D 017/00 Constructional parts, or assemblies thereof, of cells for electrolytic coating

C25D 007/12 Electroplating characterised by the article coated - Semiconductors

C25D 021/12 Processes for servicing or operating cells for electrolytic coating - Process control or regulation

C25D 005/00 Electroplating characterised by the process

C25D 005/06 Electroplating characterised by the process

C25C 003/16 Electrolytic production, recovery or refining of metals by electrolysis of melts

C25D 005/02 Electroplating characterised by the process - Electroplating of selected surface areas

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002249798

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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