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Details for Australian Patent Application No. 2002249781 (hide)

Owner TOKYO ELECTRON LIMITED

Inventors HILLMAN, Joseph, T.

Pub. Number AU-A-2002249781

PCT Pub. Number WO2002/059944

Priority 09/723,874 28.11.00 US

Filing date 31 October 2001

Wipo publication date 6 August 2002

International Classifications

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

6 February 2003 Application Open to Public Inspection

  Published as AU-A-2002249781

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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