METHOD FOR THE PURIFICATION OF CORROSIVE GASES

Details for Australian Patent Application No. 2002249251 (hide)

Owner MERCK PATENT GMBH

Inventors SCHMIDT, Hans-Jurgen; HOSTALEK, Martin; NEUMANN, Ewald; HIMMLER, Wolfgang; BUTTNER, Werner; FRITSCH, Harald

Pub. Number AU-A-2002249251

PCT Pub. Number WO2002/078820

Priority 101 15 345.7 28.03.01 DE

Filing date 4 March 2002

Wipo publication date 15 October 2002

International Classifications

B01D 053/22 Separation of gases or vapours - by diffusion

C01B 007/07 Halogens

C01B 007/19 Halogens

C01C 001/02 Ammonia

H01L 021/00 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Event Publications

3 April 2003 Application Open to Public Inspection

  Published as AU-A-2002249251

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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