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Details for Australian Patent Application No. 2002249167 (hide)

Owner INTERNATIONAL BUSINESS MACHINES CORPORATION

Inventors AUGUSTIN, Andreas, K.; FRIESE, Gerald, R.; HEIDENREICH, John, E., III; HUECKEL, Gary, R.; STEIN, Kenneth, J.; ARMACOST, Michael, D.

Pub. Number AU-A-2002249167

PCT Pub. Number WO2002/058117

Priority 09/764,832 17.01.01 US

Filing date 16 January 2002

Wipo publication date 30 July 2002

International Classifications

H01L 021/02 Processes or apparatus specially adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof -

Event Publications

13 February 2003 Application Open to Public Inspection

  Published as AU-A-2002249167

5 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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