NICKEL-TITANIUM SPUTTER TARGET ALLOY

Details for Australian Patent Application No. 2002248755 (hide)

Owner PRAXAIR S.T. TECHNOLOGY, INC.

Inventors HUNT, Thomas, J.; KOENIGSMANN, Holger, J.; GILMAN, Paul, S.

Pub. Number AU-A-2002248755

PCT Pub. Number WO2002/088408

Priority 09/841,625 25.04.01 US

Filing date 5 April 2002

Wipo publication date 11 November 2002

International Classifications

C22C 019/03 Alloys based on nickel or cobalt - based on nickel

C23C 014/14 Coating by vacuum evaporation, by sputtering or by ion implantation - Metallic material, boron or silicon

Event Publications

17 April 2003 Application Open to Public Inspection

  Published as AU-A-2002248755

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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