AQUEOUS CLEANING COMPOSITION CONTAINING COPPER-SPECIFIC CORROSION INHIBITOR FOR CLEANING INORGANIC RESIDUES ON SEMICONDUCTOR SUBSTRATE

Details for Australian Patent Application No. 2002248710 (hide)

Owner ADVANCED TECHNOLOGY MATERIALS, INC.

Inventors SEIJO, Fatima, Ma.; BERNHARD, David; NGUYEN, Long; WOJTCZAK, William, A.

Pub. Number AU-A-2002248710

PCT Pub. Number WO2002/077120

Priority 09/818,073 27.03.01 US

Filing date 27 March 2002

Wipo publication date 8 October 2002

International Classifications

C09K 013/00 Etching, surface-brightening or pickling compositions

C09K 013/06 Etching, surface-brightening or pickling compositions

C09K 013/08 Etching, surface-brightening or pickling compositions

Event Publications

27 March 2003 Application Open to Public Inspection

  Published as AU-A-2002248710

19 February 2004 Application Lapsed, Refused Or Withdrawn, Patent Ceased or Expired

  This application lapsed under section 142(2)(f)/See Reg. 8.3(3). Examination has not yet been requested or directed for this application. Note that applications or patents shown as lapsed or ceased may be restored at a later date.

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